Semiconductor manufacturing for technicians
Michael Quirk, Julian Serda
1. Introduction to the Semiconductor Industry. 2. Characteristics of Semiconductor Materials. 3. Device Technologies. 4. Silicon and Wafer Preparation. 5. Chemicals in Semiconductor Fabrication. 6. Contamination Controls in Wafer Fabs. 7. Metrology and Defect Inspection. 8. Gas Control in Process Chambers. 9. IC Fabrication Process Overview. 10. Oxidation. 11. Deposition. 12. Metallization. 13. Photolithography: Vapor Prime to Soft Bake. 14. Photolithography: Alignment and Exposure. 15. Photolithography: Photoresist Development and Advanced Lithography. 16. Etch. 17. Ion Implant. 18. Chemical Mechanical Planarization. 19. Wafer Test. 20. Assembly and Packaging. Appendices. Glossary. Index
類別:
年:
2000
出版商:
Prentice Hall
語言:
english
頁數:
510
ISBN 10:
0130815209
ISBN 13:
9780130815200
文件:
DJVU, 15.77 MB
IPFS:
,
english, 2000